<html><body style="word-wrap: break-word; -webkit-nbsp-mode: space; -webkit-line-break: after-white-space; ">Hi Jason.<div><br></div><div>The GWP of NF3 does not tell the whole story regarding its climate change impact. While NF3 has a high GWP, its utilization efficiency in semiconductor cleaning processes (especially the remote clean processes) is much higher than other fluorinated compounds typically used for chamber cleaning such as C2F6, CF4, and SF6. 2006 IPCC Guidelines for National Greenhouse Gas Inventories, Volume 3 Industrial Processes and Product Use, Chapter 6 contains emission factors for various chamber clean gases and you can compare the utilization efficiencies. Additionally, abatement devices with high NF3 DREs are readily available to abate emissions from the process.</div><div><br></div><div><br></div><div>Feel free to contact me for further discussion.<br><div apple-content-edited="true"> <div><p style="margin: 0.0px 0.0px 0.0px 0.0px"><font class="Apple-style-span" face="'Lucida Handwriting'" size="3"><span class="Apple-style-span" style="font-size: 13px;"><br></span></font></p><p style="margin: 0.0px 0.0px 0.0px 0.0px"><font class="Apple-style-span" face="'Lucida Handwriting'" size="3"><span class="Apple-style-span" style="font-size: 13px;">Best regards,</span></font></p><p style="margin: 0.0px 0.0px 0.0px 0.0px"><font face="Lucida Handwriting" size="4" style="font: 13.0px Lucida Handwriting">Laurie</font></p> <p style="margin: 0.0px 0.0px 0.0px 0.0px"><font face="Arial" size="4" style="font: 13.0px Arial"><i>Laurie S. Beu Consulting</i></font></p> <p style="margin: 0.0px 0.0px 0.0px 0.0px"><font face="Arial" size="3" style="font: 12.0px Arial"><i>Environmental Policy, Strategy & Management</i></font></p> <p style="margin: 0.0px 0.0px 0.0px 0.0px"><font face="Arial" size="3" style="font: 12.0px Arial"><i>12449 Los Indios Trail</i></font></p> <p style="margin: 0.0px 0.0px 0.0px 0.0px"><font face="Arial" size="3" style="font: 12.0px Arial"><i>Austin, Texas <span class="Apple-converted-space"> </span>78729</i></font></p> <p style="margin: 0.0px 0.0px 0.0px 0.0px"><font face="Arial" size="3" style="font: 12.0px Arial"><i>512-351-3982</i></font></p> <p style="margin: 0.0px 0.0px 0.0px 0.0px"><font face="Arial" size="3" style="font: 12.0px Arial"><i><a href="mailto:laurie.beu@earthlink.net">laurie.beu@earthlink.net</a></i></font></p> </div> </div><br><div><div>On Sep 22, 2008, at 8:25 AM, Jason Norman wrote:</div><br class="Apple-interchange-newline"><blockquote type="cite"><div>I have a potential project that provides an alternative to NF3 as part of a semi-con cleaning process.<br>NF3 has a global warming potential second only to SF6 in the current list of controlled gases yet it is not included (so far).<br>Does anyone have any experience working with NF3 or any advice as to how one might go about seeking potential carbon credits for a project that would reduce the emission of NF3?<br><br>_______________________________________________<br>Greenhouse Gas Inventory Experts Network<br><a href="http://www.ghgnetwork.org">www.ghgnetwork.org</a><br><br>To post message:<br>Discuss mailing list<br>Discuss@ghgnetwork.org<br><br>To unsubscribe:<br>http://milkyway.forumone.com/mailman/listinfo/discuss<br></div></blockquote></div><br></div></body></html>